Oxford Instruments logo
Monthly
€8,333 - €10,000
Posted August 5, 2026 · 3 days agoLast seen August 7, 2026Est. expiry September 9, 2026

Field Service Engineer

Field Service Engineer I
Concord, United States
Onsite · Technical
Full-time · Mid-Level
English
No People Management
Bachelor
5 years experience
About the role

Represent Oxford Instruments by delivering world-class technical support, installation, and maintenance for plasma etch and deposition systems (e.g., PlasmaPro, FlexAL, Estrelas etcher). This role demands a hands-on problem solver with strong technical acumen, clear communication skills, and a proactive mindset. You’ll collaborate across teams, escalate issues when needed, and maintain detailed documentation to support continuous improvement. With extensive travel across customer sites, you’ll play a critical role in driving customer satisfaction and advancing cutting-edge semiconductor technologies. Key Responsibilities • System Installation & Commissioning Lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness. • Preventive & Corrective Maintenance Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface-level symptoms and validate repairs against stringent vacuum tolerances, leak-up rates, and process benchmarks. • Customer Engagement & Technical Training Build trust and long-term relationships through responsive communication and hands-on training. Empower customers to operate and maintain systems confidently across key processes. • Advanced Troubleshooting Resolve complex hardware, and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime. • Calibration & System Upgrades Calibrate critical components (AMUs, RF Generators, APCs, MFCs) and implement performance-enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput. Required Qualifications & Experience • Education & Industry Background - Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field. Equivalent hands-on experience in semiconductor equipment service may substitute. - 5–7 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems. - Familiarity with cleanroom operations and safety protocols. • Vacuum & Power Systems - Hands-on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps. - Skilled in troubleshooting 208V electrical systems and 24V control subsystems - Extensive Experience with RF power components and pneumatically driven. • Diagnostics & Technical Tools - Proficient with diagnostic instruments: Vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters, megohm meters - Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams. • Process Knowledge - Strong understanding of RF theory and inductively coupled plasma (ICP) systems. - Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD. • Physical & Travel Requirements - Hold a valid driver’s license and safe driving record, passport, and ability to travel independently. - Must be physically agile and comfortable working in confined or awkward spaces. - Capable of independently lifting and handling equipment weighing up to 50 lbs. - Able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday Preferred Skills & Attributes • Platform & Component Experience - Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components. - Knowledge of calibration and optimization of APCs and MFCs. • Work Ethic & Collaboration - Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire. - Proactive problem-solving and openness to continuous learning. - Effective communicator with strong listening skills. - Adaptable to evolving technologies and customer needs. - Comfortable working independently or as part of a team. Compensation In accordance with Massachusetts law, the expected salary for this full-time, benefited position is between $100,000 - $120,000.

Job Details

Responsibilities

  • Lead installation and commissioning of advanced plasma etch and deposition systems
  • Ensure compliance with customer specifications and cleanroom standards
  • Execute scheduled and emergency preventive and corrective maintenance
  • Diagnose root causes and validate repairs against vacuum tolerances and process benchmarks
  • Provide technical training and support to customers
  • Resolve complex hardware and software issues using specialized diagnostic tools
  • Calibrate critical components such as AMUs, RF Generators, APCs, and MFCs
  • Implement performance-enhancing system upgrades
  • Maintain detailed documentation for continuous improvement

Requirements

  • Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field (or equivalent experience)
  • 5–7 years of field service experience in the semiconductor industry
  • Focus on plasma etch and deposition systems
  • Familiarity with cleanroom operations and safety protocols
  • Hands-on experience with vacuum technologies (turbo, cryo, roughing pumps)
  • Skilled in troubleshooting 208V electrical systems and 24V control subsystems
  • Experience with RF power components and pneumatics
  • Proficiency with diagnostic instruments (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters, megohm meters)
  • Ability to read mechanical, pneumatic, and electrical schematics
  • Strong understanding of RF theory and inductively coupled plasma (ICP) systems
  • Familiarity with semiconductor processes (RIE, PECVD, ICP, ALD)
  • Valid driver’s license and passport
  • Ability to travel independently and extensively on weekdays
  • Physically agile and able to lift up to 50 lbs

Skills & Technologies

Plasma etch and deposition systemsRIECVDICPICPCVDALEALDPECVDVacuum technologies (Turbo pumpsCryo pumpsRoughing pumps)RF power components208V electrical systems24V control subsystemsVacuum leak detectorsRF power metersDVMLCR metersMultimetersMegohm metersBrooks platformsPfeiffer/Edwards pumping systemsMKS componentsAPCMFC

Education Level

Bachelor
Seen 21 hours ago
Driver's Licence Required
Content Complete
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